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org in October 2010
Both automatic and manual process panels are within the scope of this test procedure
This Document defines a communication specification based on the A-LINK protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment
SEMI F44-0325 (technical revision)
SEMI G77-0699 (Reapproved 0706)
E13400 - SEMI E134 - Specification for Data Collection Management Revision:SEMI E134-0310 - Superseded org in October 2010* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
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